China recently achieved a milestone with its indigenous lithography system, which is capable of producing chips at nodes smaller than 65nm. However, the development of an immersive DUV system remains ...

The recent unveiling of a new local deep ultraviolet (DUV) lithography machine model by China's Ministry of Industry and Information Technology (MIIT) has become a hot topic of discussion online in ...

In the realm of science and technology, harnessing coherent light sources in the deep ultraviolet (DUV) region holds immense significance across various applications such as lithography, defect ...

A team led by Prof. SUN Haiding from the University of Science and Technology of China (USTC) developed a vertically integrated micro-scale light-emitting diode (micro-LED) array，which was then ...