FREMONT, Calif. – Asyst Technologies, Inc., has announced the Axys FastSwap atmospheric wafer transfer robot, which it claims is capable of replacing a processed wafer with a fresh one in less than ...
Proprietary systems have traditionally dominated the control of three and four-axis wafer handling robots for in-vacuum and in-air wafer applications. As a result, these systems can be limited in ...
Genmark Automation said it has added a built-in wafer-mapping sensor to its wafer handlers to increase system throughput and provide flawless wafer transfer. The Global Positioning Robot Swap-Master ...
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